Quantum electromechanics on silicon nitride nanomembranes

Fink, Johannes M and Kalaee, Mahmoud and Pitanti, Alessandro and Norte, Richard A and Heinzle, Lukas and Davanço, Marcelo I and Srinivasan, Kartik and Painter, Oskar (2016) Quantum electromechanics on silicon nitride nanomembranes. Nature Communications, 7. Article number: 12396. ISSN 2041-1723

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Radiation pressure has recently been used to effectively couple the quantum motion of mechanical elements to the fields of optical or microwave light. Integration of all three degrees of freedom—mechanical, optical and microwave—would enable a quantum interconnect between microwave and optical quantum systems. We present a platform based on silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Using planar capacitors with vacuum gaps of 60 nm and spiral inductor coils of micron pitch we realize microwave resonant circuits with large electromechanical coupling to planar acoustic structures of nanoscale dimensions and femtoFarad motional capacitance. Using this enhanced coupling, we demonstrate microwave backaction cooling of the 4.48 MHz mechanical resonance of a nanobeam to an occupancy as low as 0.32. These results indicate the viability of silicon nitride nanomembranes as an all-in-one substrate for quantum electro-opto-mechanical experiments.

Item Type: Article
DOI: 10.1038/ncomms12396
Subjects: 500 Science > 530 Physics
Research Group: Fink Group
SWORD Depositor: Sword Import User
Depositing User: Sword Import User
Date Deposited: 25 Aug 2016 07:52
Last Modified: 04 Sep 2017 14:48
URI: https://repository.ist.ac.at/id/eprint/629

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